Title | The effects of vacuum annealing on the film properties of Titanium Boride(TiBx) grown on (100) Si substrate |
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Publication year | 2001 |
Author | Young-Ki Lee, Jung-Yuel Kim, You-Kee Lee, Min-Sang Lee, C. R. Lee and Dong-Koo Park |
Journal | Metals and Materials International (IF: 3.642) |
JCR factor | 20 % |
Vol | Vol.7, pp.359-365 |
DOI | https://doi.org/10.1007/BF03186080 |